Technologies

Silicon nanowires (SiNWs) are 1D structures with diameter ranging from few tens to hundreds of nanometers and length varying from few tens of nanometers to millimiters. SiNWs are fabricated in the labs of the IMM-CNR, Rome Unit,  by using bottom-up technologies such as plasma enhanced chemical vapor deposition (PECVD) at low growth temperature ((≤350°C), allowing the use of plastic and glassy substrates. Their electrical properties can be tuned by controlling the p/n doping during the growth.

IMM has developed tactile sensors for the detection of objects and surface and for the handling of objects with humanoid robots (e-skin). These devices can be integrated on ultra-flexible and high conformable substrates and they can be used for multiple applications: 1) for a correct interaction with objects distributed in complex environment; 2) for a safe short-range interaction between humanoid robot and humans; 3) for fabricating smart wearables for the detection of biometric parameters (e.g. heartbeat); 4) for remotely control rovers with wearable gadgets.