Mist deposition

Chemical solution deposition of metal-organic precursors have favoured the research and development of thin films of simple and complex oxides such as Pb(Zr,Ti)O3, and Al2O3, up to their industrial application in pyroelectric and capacitor devices. Deposition methods used are spin-on and dip-coating. The advantages of the techniques are:

(i) low cost of equipment and chemicals

(ii) large area deposition

(iii) low crystallisation temperatures