Pressure sensor

The proposed technology is based on the micro-fabrication of electrodes in order to generate surface acoustic waves (SAW) with well-defined frequencies, on piezoelectric substrates. The operating principle of a surface acoustic wave sensor is linked to the variation of the characteristics of the acoustic wave that propagates on the device (e.g. wave velocity on the substrate, etc.) caused by the interaction with the environment (e.g. interaction of an analyte on the surface of the device, deformation of the substrate, etc.).