The invention consists of a method and apparatus for the delivery at low pressure (equal to or less than 10-7 Torr) of monoatomic fluorine for reaction with surfaces in an ultra-clean environment. Thanks to the low pressure values involved in the proposed method, the risks associated with the use of fluorine are reduced to a minimum.
Technologies
In this section it is possible to view, also through targeted research, the technologies inserted in the PROMO-TT Database. For further information on the technologies and to contact the CNR Research Teams who developed them, it is necessary to contact the Project Manager (see the references at the bottom of each record card).
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The proposed device is a semi-transparent screen that allows simultaneous viewing of what is beyond the screen and the images projected onto its surface. It consists of two thin glass plates with reflective elements arranged as microlenses, embedded in a resin. The projector's light is reflected by the elements towards the user's eye, while external light passes through the transparent layers without distortion. The transparency and brightness of the screen can be adjusted by modifying the reflective elements.